使用显微光谱法在微小区域内通过绝对反射率进行测量，可进行高精度膜厚度/光学常数分析。
KETONGGUOFEIPOHUAIXINGHEFEIJIECHUFANGSHICELIANGTUMODEHOUDU，LIRUGEZHONGMO、JINGPIAN、GUANGXUECAILIAOHEDUOCENGMO。 CELIANGSHIJIANSHANG，NENGDADAO1MIAO/DIANDEGAOSUCELIANG，BINGQIEDAZAILEJISHISHICHUCISHIYONGDEYONGHU，YEKERONGYICHUFENXIGUANGXUECHANGSHUDERUANJIAN
YINGCHAOLIANSAIXIAZHUXINXI
TEDIAN
头部集成了薄膜厚度测量所需功能
通过显微光谱法测量高精度绝对反射率（多层膜厚度，光学常数）
1点1秒高速测量
显微分光下广范围的光学系统（紫外至近红外）
区域传感器的安全机制
易于分析向导，初学者也能够进行光学常数分析
独立测量头对应各种inline客制化需求
支持各种自定义
| OPTM-A1 | OPTM-A2 | OPTM-A3 | |
|---|---|---|---|
| 波長范围 | 230 ~ 800 nm | 360 ~ 1100 nm | 900 ~ 1600 nm |
| 膜厚范围 | 1nm ~ 35μm | 7nm ~ 49μm | 16nm ~ 92μm |
| 测定时间 | 1秒 / 1点 | ||
| 光斑大小 | 10μm (最小约5μm) | ||
| 感光元件 | CCD | InGaAs | |
| 光源規格 | 氘灯+卤素灯 | 卤素灯 | |
| 电源規格 | AC100V±10V 750VA（自动样品台规格） | ||
| 尺寸 | 555(W) × 537(D) × 568(H) mm (自动样品台规格之主体部分) | ||
| 重量 | 约 55kg（自动样品台规格之主体部分） | ||
测量项目：
绝对反射率测量
多层膜解析
光学常数分析（n：折射率，k：消光系数）
测量示例：
SiO2 SiN的膜厚测量
BANDAOTIJINGTIGUANTONGGUOKONGZHIDIANLIUDEDAOTONGZHUANGTAILAIFASONGXINHAO，DANSHIWEILEFANGZHIDIANLIUXIELOUHELINGYIGEJINGTIGUANDEDIANLIULIUGUORENYILUJING，YOUBIYAOGELIJINGTIGUAN，MAIRUJUEYUANMO。 SiO 2（ERYANGHUAGUI）HUOSiN（DANHUAGUI）KEYONGYUJUEYUANMO。 SiO 2YONGZUOJUEYUANMO，ERSiNYONGZUOJUYOUBISiO 2GENGGAODEJIEDIANCHANGSHUDEJUEYUANMO，HUOSHIZUOWEITONGGUOCMPQUCHUSiO 2DEBUBIYAODEZUDANGCENG。ZHIHOUSiNYEBEIQUCHU。 WEILEJUEYUANMODEXINGNENGHEJINGQUEDEGONGYIKONGZHI，YOUBIYAOCELIANGZHEIXIEMOHOUDU。
彩色抗蚀剂（RGB）的薄膜厚度测量[FE - 0003]
YEJINGXIANSHIQIDEJIEGOUTONGCHANGRUYOUTUSUOSHI。 CFZAIYIGEXIANGSUZHONGJUYOURGB，BINGQIETASHIFEICHANGJINGXIDEWEIXIAOTUAN。 ZAICFMOXINGCHENGFANGFAZHONG，ZHULIUSHICAIYONGYINGYONGZAIBOLIDEZHENGGEBIAOMIANSHANGTUFUJIYUYANLIAODECAISEKANGSHIJI，TONGGUOGUANGKEDUIQIJINXINGPUGUANGHEXIANYING，BINGQIEZAIMEIGERGBCHUJINLIUXIATUANHUADEBUFENDEGONGYI。 ZAIZHEIZHONGQINGKUANGXIA，RUGUOCAISEKANGSHIJIDEHOUDUBUHENGDING，JIANGDAOZHITUANBIANXINGHEZUOWEILVSEQIDAOZHIYANSEBIANHUA，YINCIGUANLIMOHOUDUZHIHENZHONGYAO。
硬涂层膜厚度的测量[FE-0004]
JINNIANLAI，SHIYONGJUYOUGEZHONGGONGNENGDEGAOXINGNENGBOMODEYINGCHAOLIANSAIXIAZHUBEIGUANGFANSHIYONG，BINGQIEGENJUYINGYONGBUTONG，HAIXUYAOTIGONGJUYOUZHURUMOCAZULI，KANGCHONGJIXING，NAIREXING，BOMOBIAOMIANDENAIHUAXUEXINGDENGXINGNENGDEBAOHUBOMO。TONGCHANGBAOHUMOCENGSHISHIYONGXINGCHENGDEYINGTUCENG（HC）MO，DANSHIGENJUHCMODEHOUDUBUTONG，KENENGCHUXIANBUQIBAOHUMODEZUOYONG，MOZHONGFASHENGQIAOQU，HUOZHEWAIGUANBUJUNYUNHEBIANXINGDENGBULIANG。 YINCI，GUANLIHCCENGDEMOHOUZHIHENYOUBIYAO。
考虑到表面粗糙度测量的膜厚值[FE-0007]
DANGYANGPINBIAOMIANCUNZAICUCAODU（CUCAODU）SHI，JIANGBIAOMIANCUCAODUHEKONGQI（air）JIMOHOUCAILIAOYI1：1DEBILIHUNHE,MONIWEI“CUCAOCENG”，KEYIFENXICUCAODUHEMOHOUDU。CICHUSHILILECELIANGBIAOMIANCUCAODUWEIJInmDESiN（DANHUAGUI）DEQINGKUANG。
使用超晶格模型测量干涉滤光片[FE-0009]
GANSHELVGUANGPIANSHITONGGUOKONGZHIMOHOUJInkJINXINGCHENGMO，KEYISHIDEZAIZHIDINGBOZHANGDAIYULIJUYOURENYIDEFANSHELVHETOUGUOLV。QIZHONGTEBIESHIGAOJINGDUDEGANSHELVGUANGPIANSHIJIANGGAOZHESHELVCENGHEDIZHESHELVCENGZUHE（YIZU），ZAIJINGGUOSHUCIZHEIYANGDEXUNHUANERCHENGMO。YIXIAJISHULEZHEILEIYANGPINSHIYONGCHAOJINGGEMOXINGCELIANG、FENXIDEANLI。
使用非干涉层模型测量封装的有机EL材料[FE - 0010]
YOUJIELCAILIAOYISHOUYANGQIHESHUIFENDEYINGXIANG，BINGQIEZAIZHENGCHANGDAQITIAOJIANXIATAMENKENENGHUIFASHENGBIANZHIHESUNHUAI。 YINCI，ZAICHENGMOHOUXULIJIYONGBOLIMIFENG。 CICHUZHANSHILEMIFENGZHUANGTAIXIATONGGUOBOLICELIANGMOHOUDUDEQINGKUANG。BOLIHEZHONGJIANKONGQICENGSHIYONGFEIGANSHECENGMOXING。
使用多点相同分析测量未知的超薄nk [FE-0013]
WEILETONGGUONIHEZUIXIAOERCHENGFALAIFENXIMOHOUDUZHI（d）XUYAOCAILIAOnk。 RUGUOnkWEIZHI，ZEdHEnkDOUBEIFENXIWEIKEBIANCANSHU。 RANER，ZAIdWEI100nmHUOGENGXIAODECHAOBOMODEQINGKUANGXIA，dHEnkSHIWUFAFENLIDE，YINCIJINGDUJIANGJIANGDIBINGQIEJIANGWUFAQIUCHUJINGQUEDEd。 ZAIZHEIZHONGQINGKUANGXIA，CELIANGBUTONGdDEDUOGEYANGBEN，JIASHEnkSHIXIANGTONGDE，BINGJINXINGTONGSHIFENXI（DUODIANXIANGTONGFENXI）， ZEKEYIGAOJINGDU、JINGQUEDIQIUCHUnkHEd。
用界面系数测量基板的薄膜厚度[FE-0015]
RUGUOJIBANBIAOMIANFEIJINGMIANQIECUCAODUDA，ZEYOUYUSANSHE，CELIANGGUANGJIANGDIQIECELIANGDEFANSHELVDIYUSHIJIZHI。ERTONGGUOSHIYONGJIEMIANXISHU，YINWEIKAOLVDAOLEJIBANBIAOMIANSHANGDEFANSHELVDEJIANGDI，KEYICELIANGCHUJIBANSHANGBOMODEMOHOUDUZHI。 ZUOWEISHILI，ZHANSHICELIANGFASICHENGPINLVJIBANSHANGDESHUZHIMODEMOHOUDUDELIZI。
GEZHONGYONGTUDEDLCTUCENGHOUDUDECELIANG
DLC（LEIJINGANGSHITAN）SHIWUDINGXINGTANJICAILIAO。 YOUYUQIGAOYINGDU、DIMOCAXISHU、NAIMOXING、DIANJUEYUANXING、GAOZUGEXING、BIAOMIANGAIXINGYIJIYUQITACAILIAODEQINHEXINGDENGTEZHENG，BEIGUANGFANYONGYUGEZHONGYONGTU。 JINNIANLAI，GENJUGEZHONGBUTONGDEYINGYONG，MOHOUDUCELIANGDEXUQIUYEZAIZENGJIA。
YIBANZUOFASHITONGGUOSHIYONGDIANZIXIANWEIJINGGUANCHAZHUNBEIDEJIANCEYANGPINHENGJIEMIANLAIJINXINGPOHUAIXINGDEDLCHOUDUCELIANG。ERDAZHONGDIANZICAIYONGDEGUANGGANSHEXINGMOHOUJI，ZEKEYIFEIPOHUAIXINGDIHEGAOSUDIJINXINGCELIANG。TONGGUOGAIBIANCELIANGBOZHANGFANWEI，HAIKEYICELIANGCONGJIBOMODAOCHAOHOUMODEGUANGFANWEIDEMOHOUDU。
TONGGUOCAIYONGYINGCHAOLIANSAIXIAZHUZIJIDEXIANWEIJINGGUANGXUEXITONG，BUJINKEYICELIANGJIANCEYANGPIN，HAIKEYICELIANGYOUXINGZHUANGDEYANGPIN。 CIWAI，JIANSHIQIYIBIANQUERENJIANCHACELIANGWEIZHIYIBIANJINXINGCELIANGDEFANGSHI，HAIKEYIYONGYUFENXIYICHANGYUANYIN。
ZHICHIDINGZHIDEQINGXIE/XUANZHUANPINGTAI，KEDUIYINGGEZHONGXINGZHUANG。KEYICELIANGSHIJIYANGBENDERENYIDUOCHUWEIZHI。
光学干涉膜厚度系统的薄弱点是在不知道材料的光学常数（nk）的情况下，无法进行精确的膜厚度测量，对此大塚电子通过使用独特的分析方法来确认：多点分析。通过同时分析事先准备的厚度不同的样品即可测量。与传统测量方法相比，可以获得极高精度的nk。
通过NIST（美国国家标准与技术研究院）认证的标准样品进行校准，保证了可追溯性。
